On this paper, The brand new lapping slurry and sprucing slurry are released. As well as the deliquescence degree of CLBO is fallen to least expensive. A different Functioning technological innovation can be adopted. After rough sharpening, the focus of ultra-precision polishing slurry is elevated effectively. So does the ultra-precision polishing speed, plus the wiping pace is quicker compared to the deliquescence speed. The CLBO crystal surface roughness can achieve 1nm and continue to keep the area excellent properly. Accessibility through your establishment
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The average ability with the NIR laser even now has the likely to get improved to tens of watts for instance 70 W [26] In case the double-pass configuration may very well be utilized with the Yb:YAG SCF amplifier stage. That's why, When the conversion effectiveness of 31% from NIR to DUV may be nonetheless preserved at this higher electricity ailment, the typical output electric power of the DUV laser at 258 nm could possibly be a lot more than twenty W, which might be considered a impressive ability amount for the DUV laser and result in the unanticipated DUV laser machining final results. Additionally, for prime-electricity DUV laser, the UV hurt of the nonlinear crystal, such as the Home windows for CLBO crystal and also the mirrors, is an additional essential parameter for long run and steady operation.
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On the opposite side, the facility scaling of your NIR laser is an additional facet to boost the average electric power with the 193-nm DUV laser. A result of the lack of the superior-electricity amplification Answer in the NIR get more info laser (for instance at 1553 nm), nonlinear frequency procedures including optical parameter oscillation (OPO) can be applied to produce a wavelength converter by shifting the wavelength from one μm to the desired wavelength as well as acquiring relative higher electrical power [21]. A short while ago, a diamond Raman laser showed its capacity in acquiring a large electricity along with a large conversion effectiveness for the 1st Stokes with the one-μm laser [22,23], which suggests the possibility to get utilized while in the 193-nm DUV laser era on account of its substantial Raman achieve and huge frequency shift.
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In addition, combining the good-state laser with other nonlinear course of action for example stimulated Raman scattering, NIR lasers may be obtained at new wavelengths with higher electrical power and large beam high quality, which was analyzed with the proof-of-principle experiment. This Raman laser scheme supplies a whole new path to the higher-ability DUV laser, Specifically for the wavelength of 193 nm.
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